Sweeping the lean angle can increase movie thickness uniformity and sidewall protection while also averting substantial Electrical power-reflected neutral species for critical processes.
IBSD will take area within a higher vacuum atmosphere, reducing noble gasoline inclusion within the deposited movie and improving the environmental steadiness of your coating.
An optional cryogenic pump enhances base strain and pumping pace and will be isolated from the chamber all through reactive processes with oxygen.
The dimensions, posture, and equipment ratio of each and every planet are optimized to supply the best possible possible movie thickness uniformity.
Our Reticle® ion beam sputter deposition programs are built and engineered to generate precise optical movies of the very best purity, density, and balance.
Variable angle levels enable for extremely powerful slim movie methods. On the other hand, one of its major troubles is reproducibility. The substrate is frequently established at a really oblique angle in relation to the resource, plus the movies are certainly delicate on the precision of this angle.
Angstrom Engineering® models and engineers Just about every Reticle® System to offer our companions during the optics Local community a chance to create the films they require with great purity, density, and uniformity, all inside a really repeatable and automatic trend.
Our special design allows for immediate or oblique checking on the variable angle stage, removing the necessity for tooling components or perhaps a witness glass changer. Learn more with regards to the Optical Monitoring & Command bundle here.
IBSD processes might also hire a secondary ion source for substrate cleaning and energetic assist, substrate heating for reactive deposition, As well as in-situ optical monitoring or ellipsometry for vital layer thickness termination.
All normal Reticle® platforms incorporate a further Rare metals for aerospace gridless end-Corridor ion source with hollow cathode neutralizer.
The deposition ion supply is directed towards a cloth goal which has been optimized in equally measurement and place with the essential deposition geometry.
Self-aligned ion optics are configured specifically for the desired deposition necessities and geometry of your procedure.
A minimal-frequency neutralizer ensures steady beam operation without contamination from a traditional filament.
A shuttered QCM Positioned close to the substrate delivers feed-back over the deposition level and physical thickness of your rising movie.
Thoughtful design and style in the ion beam focusing optics confines the beam entirely to the area with the concentrate on, doing away with any threat of contamination.